High-Precision Single Station Spin Coater – Customizable Ramp & Speed Profile for R&D Labs

High-Precision Single Station Spin Coater – Customizable Ramp & Speed Profile for R&D Labs

Product Description

Our single station spin coater is designed for uniform thin film deposition of photoresist, polyimide, sol-gel, and nanoparticles. It features high speed stability (< ±1% fluctuation), low vibration, and a chemical-resistant bowl. The compact design is suitable for R&D labs, pilot lines, and small-batch production.
Customizable options include:chuck size, bowl material (PTFE/PP/stainless steel), motor type (brushless DC / servo), and exhaust port position.

Technical Parameters:(table format)

Application

• Semiconductor wafer coating (photoresist, ARC)

• OLED and quantum dot thin films

• Sol-gel and spin-on glass (SOG)

• Biosensor and polymer film deposition

• Perovskite solar cell fabrication

Also suitable for customizable high-viscosity or high-temperature processes.

Customization

We offer full customizable options:

• Bowl inner diameter and drain groove design

• Vacuum chuck shape for non-standard substrates (e.g., rectangular, broken wafers)

• Automatic cover with interlock

• Nitrogen blow-dry during spin

• Multiple dispense nozzle brackets

• Special coating programs (e.g., reverse spin, pulse spin)

Feature

• High acceleration repeatability for uniform edge bead

• Real-time speed curve display and data export (CSV)

• Easy-swap chuck design without tools

• Chemical-resistant and seamless stainless steel or PTFE bowl

• Autofill rinse function for cleaning between runs

• Customizable recipe library for multiple operators

Support and Services

• Installation guide and calibration video included

• Remote troubleshooting within 24 hours

• 18 months warranty on motor and controller

• On-site training (available for customizable packages)

• Spare parts shipment from local warehouses (US/EU/Asia)

Packing and Shipping

• Packing:Foam-lined wooden case with anti-static bag

• Dimensions (carton):55×45×45 cm

• Gross weight:approx. 22 kg

• Shipping:DHL / FedEx / UPS air freight；Sea freight available for bulk orders

• Customizable labeling and export packaging for drop-shipping

FAQ

Q1:Can the speed ramp be customized for multiple steps?
Yes. Up to 20-step profiles are customizable per recipe.

Q2:Does it fit 100 mm round or square substrates?
Yes. We offer customizable chucks for square, rectangular, and irregular substrates.

Q3:What is the lead time for a custom bowl material?
Standard units ship in 7 days. Customizable bowls (e.g., PTFE) require 3–4 weeks.

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High-Precision Single Station Spin Coater – Customizable Ramp & Speed Profile for R&D Labs Images